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Turbomolecular Pumps Rely on Diaphragm Technology for Roughing Operations

Turbomolecular pump systems require deep vacuum to start and operate effectively. They often rely on roughing pumps using diaphragm pump technology to achieve this.

Turbomolecular pump systems are widely used in a variety of applications, including mass spectrometry, leak detection, and semiconductor manufacturing. These complex systems require extremely deep vacuums to operate effectively and rely on diaphragm pumps to reach these levels. Diaphragm pump technology offers several advantages over other pump types in these applications.

How do Turbomolecular Pumps Work?

Turbomolecular pumps use rotating metal turbine blades to move gas molecules through a chamber. Molecules flow into the pump’s inlet port where the blades push them further down the chamber. They are then compressed before flowing out through an exhaust port. Turbomolecular pumps need to operate in a deep vacuum to work effectively. They often rely on roughing pumps, sometime called backing pumps, to create this vacuum. Such low vacuum is required, as the blades move so fast, they are unable to handle air friction at atmospheric pressure.

 

Turbomolecular pumps are common in a variety of applications. They are a critical part of mass spectrometry, where they help create deep vacuum environments to ensure accurate measurements. They serve a similar role in scanning electron microscopes, where deep vacuum atmospheres are required for high magnification analysis. They are also present in leak detection and environmental analysis applications, as well as semiconductor applications that require deep vacuum.

Diaphragm Pumps Provide Great Advantages

Diaphragm pumps are frequently used as roughing pumps to generate vacuum for turbomolecular systems. Without a deep enough vacuum, turbomolecular pumps cannot operate effectively. In some cases, they will not be able to start at all. KNF offers diaphragm pumps with ultimate vacuum down to 0.5 mbar (abs.). In addition to being able to achieve required pre-vacuum levels, they have several other advantages over other pump technologies.

 

Diaphragm pumps provide a stable vacuum level, long service life and low maintenance. They operate oil-free, eliminating the potential for cross contamination with pumped media.  KNF pumps are available with brushless DC (BLDC) motors, which allow speed-controlled operation and parameterization capabilities. This is important for turbomolecular pumps, which need to start very quickly before being slowed to operational speed. Diaphragm pumps can also be fitted with gas ballasts for applications where wet gases are present. KNF pumps are able to be installed and assembled in any orientation, with options like the N 84 series available for portable solutions that require small, low weight solutions.    

Wide Range of Diaphragm Pump Solutions

KNF offers a variety of solutions for roughing pump applications. The N 952 can quickly evacuate a chamber while maintaining optimal performance down to final vacuum. It can achieve a maximum vacuum of 1.5 mbar (abs.) while providing a maximum flow rate of 36 l/min. It is available with a variety of configurations and motor options, including digitally adjustable motors.

 

The N 813 is also a strong choice as a roughing pump, with a maximum vacuum down to 0.5 mbar (abs.) and a maximum flow rate of 13 l/min.  It provides contamination-free media transfer, preventing back flow contamination after shutoff while also preventing contamination of media from outgoing air. The N 813 is also available with a customizable motor, allowing for the parameterization required for roughing pump applications.   

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