Dry Vacuum Pumps and Liquid Pumps for the Semiconductor Industry
KNF offers state-of-the-art oil-free vacuum pumps and liquid pumps that meet the demanding standards of the semiconductor industry.
Few industries consistently push the boundaries of what is physically possible like the semiconductor industry. For decades, it has delivered one breakthrough after another, increasing the processing power of microchips while enabling ever greater miniaturisation. To continue this quest for innovation, the semiconductor industry relies on cutting-edge technologies from a variety of disciplines, including pump technology. KNF is proud to support this innovative industry with state-of-the-art diaphragm pump technology and unique customised solutions.
Why Pumps Are Essential for Semiconductor Manufacturing
The semiconductor industry operates at physical extremes and requires multiple production steps to achieve extraordinary results. This includes the use of various challenging fluids such as ultrapure water, highly sensitive inks for masking, aggressive acids for etching, strong solvents for cleaning, and gases such as argon, neon, or xenon. In addition to the need to transfer these fluids, many of these process steps require very high vacuum levels making the use of vacuum pumps necessary as well.
All of these manufacturing tasks require pumps with outstanding reliability, cleanliness, robustness, and performance, along with chemical compatibility, compactness or low vibration. Because of these demanding requirements, diaphragm pumps are the technology of choice for a variety of tasks in the semiconductor industry.
The Right Pump for Every Step of the Manufacturing Process
KNF pumps are used throughout the semiconductor manufacturing process. This starts with wafer production, where our pumps are used for handling silicon wafers. In the subsequent production steps, KNF pumps are used for recirculating, degassing and applying the liquids used in the photolithographic processes, as well as gas pumps for transferring the excimer required for the special lasers used in the photochemical processes.
During the etching process, liquid pumps are needed to handle ultrapure water and the aggressive acids used. Quality control is critical to most processes in the semiconductor industry, including media and air control. KNF offers pump solutions for all types of gas and liquid applications, as well as clean room monitoring technologies.
Dry Vacuum Pumps Are Indispensable for Semiconductor Manufacturing
Operating at the forefront of miniaturisation, the semiconductor industry relies heavily on extreme precision throughout the manufacturing process. One way to achieve this precision is to eliminate all contaminants from the manufacturing process. This requires many processes to be performed under clean room or even ultra-high vacuum conditions. To create an ultra-high vacuum, a positive displacement pump such as a diaphragm pump is typically used to create a deep vacuum, which can then be further evacuated by a turbomolecular pump and sometimes an ion getter pump.
Areas That Benefit From Our Diaphragm Pump Technology
Since oil and other lubricants would contaminate these environments, vacuum pumps used in the semiconductor industry must run completely dry. To avoid contamination and loss of performance and media, these pumps also need to provide minimal leak rates. Because semiconductor manufacturers operate complex, space restricted machinery, the pumps also need to be digitally controllable and compact. Durability and reliability are key requirements for pumps in this industry, as the equipment is very expensive and therefore needs to operate reliably for long periods of time to be economical.
In addition to running completely dry, diaphragm pumps can start against vacuum, and most diaphragm pumps can run indefinitely at maximum vacuum without overheating. They are also gas-tight, robust and reliable, requiring little or no maintenance. With KNF diaphragm pumps, customers have the choice of modern brushless DC motors, which can be parameterised individually and offer precise digital control.
The semiconductor industry uses a number of different gases in its processes. In particular, lithography processes require inert gases for operating special excimer lasers. These lasers are filled with gases such as argon, neon or xenon. To maintain the performance of the excimer laser, it is necessary to regularly refresh the noble gas mixture used. KNF gas pumps are used to recirculate the laser gas. Diaphragm vacuum pumps are also used to evacuate reservoirs and replace used inert gas.
From start to finish, the semiconductor manufacturing process uses a wide range of liquids for many different purposes. Depending on the step in the process, the liquids present different challenges and require specialised pumps that meet different requirements. Some liquids, like hydrochloric acid used for etching, must be pumped with chemically resistant equipment.
Other liquids, such as special UV inks or conductive inks, are extremely sensitive and must be ultra-pure, requiring special pump materials that are completely inert and do not alter the media’s properties. Even pumps for seemingly simple tasks like the aspiration of ultrapure water used during the etching process, face extraordinary demands like years of reliable and maintenance-free operation.
Almost all semiconductor manufacturing processes involving liquids benefit from the advantages that diaphragm pumps offer over other pump types. Their leak-tightness by design is important for handling both aggressive and sensitive media. While hazardous media must not leak into the environment, it is also critical that sensitive media is not contaminated. Another advantage is that the self-priming, dry-run-safe liquid diaphragm pumps are easy to operate and very durable. This is a key advantage because many liquid pumps must operate reliably for several years, as unplanned downtime is extremely costly and therefore unacceptable in the semiconductor industry.
All KNF liquid diaphragm pumps can be customised flexibly, economically and quickly with many options for motors, pump materials, mechanical parts, electrical and hydraulic connections, as well as digital customisation options for advanced controllability. In this way, KNF can provide highly individualised solutions from batch size one.
KNF Smooth Flow Technology Paves the Way for Diaphragm Pumps in Semiconductor Applications
For applications that require very low levels of pulsation, KNF offers special Smooth Flow pumps that reduce pulsation to an absolute minimum. This allows KNF technology to be used in areas where conventional diaphragm pumps would generate too much pulsation. Ink transfer systems in particular benefit greatly from these properties, as many inks are sensitive or, like many conductive inks, are abrasive and therefore a challenge for other pump technologies.
How OEMs and Semiconductor Manufacturers Benefit From Customized KNF Pumps
While many systems for the semiconductor industry are manufactured by OEMs, the semiconductor industry also uses its own pumps. With a global network of Sales Centres and our broad and deep application knowledge, KNF is proud to offer state-of-the-art diaphragm pump technology to both OEMs and semiconductor manufacturers.
Our innovative modular design approach allows us to swiftly, reliably, and cost-effectively customise pumps to meet specific application needs, whether for small batches or large-scale production. By collaborating closely with our customers, we push the boundaries of customisation, creating innovative and perfectly fitting pump solutions. These partnerships often evolve into long-lasting relationships, built on trust and mutual success.
